发明名称 |
BIOLOGICAL SENSING STRUCTURES AND METHODS OF FORMING THE SAME |
摘要 |
A method of forming of biological sensing structures including a portion of a substrate is recessed to form a plurality of mesas in the substrate. Each of the plurality of mesas has a top surface and a sidewall surface. A first light reflecting layer is deposited over the top surface and the sidewall surface of each mesa. A filling material is formed over a first portion of the first light reflecting layer. A stop layer is deposited over the filling material and a second portion of the first light reflecting layer. A sacrificial layer is formed over the stop layer and is planarized exposing the stop layer. A first opening is formed in the stop layer and the first light reflecting layer. A second light reflecting layer is deposited over the first opening. A second opening is formed in the second light reflecting layer.
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申请公布号 |
US2013208371(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
US201213372141 |
申请日期 |
2012.02.13 |
申请人 |
LIN HUNG-HUA;CHU LI-CHENG;WU MING-TUNG;HSIEH YUAN-CHIH;CHAO LAN-LIN;TSAI CHIA-SHIUNG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIN HUNG-HUA;CHU LI-CHENG;WU MING-TUNG;HSIEH YUAN-CHIH;CHAO LAN-LIN;TSAI CHIA-SHIUNG |
分类号 |
G02B5/08;B05D3/10;B05D5/06 |
主分类号 |
G02B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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