发明名称 |
RADIATION SOURCE AND LITHOGRAPIC APPARATUS |
摘要 |
The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardly whereby gravity assists in the establishment of the stream. The droplets are monitored using a visualization system and once the stream is determined to have the desired characteristics the stream generator is moved to a second position of steady state use in which the droplet stream is emitted in a horizontal direction. |
申请公布号 |
WO2013117355(A1) |
申请公布日期 |
2013.08.15 |
申请号 |
WO2013EP50055 |
申请日期 |
2013.01.03 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
DIJKSMAN, JOHAN;HULTERMANS, RONALD;KEMPEN, ANTONIUS;BADIE, RAMIN |
分类号 |
H05G2/00 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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