| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system that reduces power consumption without sacrificing throughput, and to provide a substrate processing method.SOLUTION: A substrate processing system 10 includes a transport section 15, a first processing chamber 16, a second processing chamber 18, and a main control section 30. The transport section 15 has a transport robot 22 that transports a workpiece 20. The first processing chamber 16 and the second processing chamber 18 are arranged around the transport section 15. The first processing chamber 16 and the second processing chamber 18 have respective doors 162 and 182 that are allowed to be opened and closed when the workpiece 20 is carried thereinto and thereoutof. The main control section 30 controls the operations of the robot 22 and the doors 162 and 182 in such a manner that the robot 22 accesses the first processing chamber 16 and the second processing chamber 18 alternately, instead of accessing either of them successively. |
