| 摘要 |
Provided is a cleaning system including an electrolysis unit that electrolyses a sulphuric acid solution, thereby generating persulphuric acid, an electrolytic solution storage unit that stores the electrolyzed sulphuric acid solution, a first circulation line that circulates the sulphuric acid solution between the electrolysis unit and the electrolytic solution storage unit, a cleaning device that cleans a material subject to cleaning by using the sulphuric acid solution containing the persulphuric acid, a heating unit that heats the sulphuric acid solution used for the cleaning device, a waste liquid storage unit that stores the sulphuric acid solution used by the cleaning device, a second circulation line that transports the sulphuric acid solution electrolyzed by the electrolysis unit via the heating unit to the cleaning device, and circulates the sulphuric acid solution used by the cleaning device for the cleaning via the waste liquid storage unit, and a third circulation line that transports the sulphuric acid solution electrolyzed by the electrolysis unit to the waste liquid storage unit without passing the sulphuric acid solution through the cleaning device, thereby circulating the sulphuric acid solution.
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