METHOD FOR MANUFACTURING LAMINATED BODY

摘要

A method for manufacturing a laminated body including a substrate, a support body, and a separating layer, the method including a preliminary treatment process for increasing the temperature of the support body transported into a reaction chamber and the temperature in the reaction chamber via plasma treatment, and a separating layer forming process for supplying a source gas for forming the separating layer into the reaction chamber after the preliminary treatment process and forming the separating layer on the support body.