发明名称 |
Scanning probe microscopy cantilever comprising an electromagnetic sensor |
摘要 |
An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever. |
申请公布号 |
GB2493585(B) |
申请公布日期 |
2013.08.14 |
申请号 |
GB20120007732 |
申请日期 |
2012.05.03 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JENS HOFRICHTER;PHILIP PAUL;FELIX HOLZNER;FOLKERT HORST |
分类号 |
G01Q70/16;B82Y15/00;B82Y35/00;G01Q20/02;G01Q20/04 |
主分类号 |
G01Q70/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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