发明名称
摘要 <p>A method for the abatement of one or more pyrophoric gases in a gas stream, which comprises introducing water in to the gas stream and/or mixing the gas stream with preheated air and introducing the gas stream in to a container in which the pyrophoric gases are abated. <IMAGE></p>
申请公布号 JP5265828(B2) 申请公布日期 2013.08.14
申请号 JP20010058327 申请日期 2001.03.02
申请人 发明人
分类号 B01D53/34;H01L21/205;B01D53/46;B01D53/68;B01D53/70;C23C16/44 主分类号 B01D53/34
代理机构 代理人
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