| 摘要 |
<p>PURPOSE: An apparatus and method for processing a substrate are provided to prevent a misalignment by installing a fixing pin on the peripheral part of a stage. CONSTITUTION: A stage (11) loads a target substrate. A plurality of support pins (16) are installed around the stage to move up and down. The support pins protrude to the upper side of the stage and support the peripheral part of the target substrate. A support pin lifting device (17) lifts the support pins.</p> |
