发明名称 A Probe Pin and a Manufacturing Method of the same
摘要 PURPOSE: A probe pin and a method for manufacturing the same are provided to omit a separate metal layer for an electroplating method by forming a probe tip manufactured by the chemical reaction of a seed layer, and to simplify a process. CONSTITUTION: A base substrate including a probe tip region and a probe beam region is provided. A first photoresist pattern layer is formed on the front surface of a base substrate except the probe tip region and the probe beam region. A first metal layer(230) is formed in the probe tip region and the probe beam region. The first metal layer comprises a probe tip(230a) and a first probe beam(230b). A second photoresist pattern layer for exposing the probe tip region and the probe beam region is formed. A second metal layer(251a,251b) is formed in the exposed probe tip region and the probe beam region.
申请公布号 KR101296352(B1) 申请公布日期 2013.08.14
申请号 KR20110114007 申请日期 2011.11.03
申请人 发明人
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
代理机构 代理人
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