| 摘要 |
PURPOSE: A film pressing type of an imprinting apparatus is provided to evenly form a resin residual film on the surface of a substrate by applying equal pressure and removing an air trap between a film and a substrate-resin-stamp laminate. CONSTITUTION: A film pressing type of an imprinting apparatus comprises a film feed oil(71), a film recovering roll(72), and a roll driving unit. The film feed roll is rotationally installed at one side of a chamber unit(10), and wound with a new film(50). The film recovering roll is rotationally installed at the other side of the chamber unit. The film recovering roll passes through a chamber, and is wound with a used film. The roll driving unit rotates the film recovering roll. |
