Substrate inspecting method and methods of manufacturing an element and a substrate

摘要

A substrate inspection method allowing inspection of all a plurality of substrates each provided at its surface with a plurality of layers by determining quality of the plurality of layers as well as methods of manufacturing the substrate and an element using the substrate inspection method are provided. The substrate inspection method includes a step (S 100) of preparing the substrate (10) provided at its main surface with the plurality of layers, a film forming step (S200), a local etching step (S321), and an inspection step (S323) or a composition analysis step (S322). In the step (S321), a concavity (7) is formed in a region provided with an epitaxial layer of the main surface of the substrate by removing at least partially the epitaxial layer. In the inspection step (S323), the inspection is performed on the layer exposed in the concavity (7).