DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

PURPOSE: An image drawing device and a method for manufacturing an article are provided to improve a throughput by drawing a plurality of charged particle beams on a substrate. CONSTITUTION: A stage is controlled by a stage control circuit. A digital to analog conversion circuit is formed on an output terminal. The output terminal is formed on a deflector signal control circuit (109). A signal processing circuit (107) processes a signal of an electron beam detecting unit. A lens control circuit (106) controls an electrostatic lens. [Reference numerals] (100) Control unit; (101) Lens control circuit; (102) Writing pattern generating circuit; (103) Bitmap converting circuit; (104) Energy quantity command generating circuit; (105) Blanking control circuit; (106) Lens control circuit; (107) Signal processing circuit; (108) Stage control circuit; (109) Deflector signal control circuit; (110) Deflector amplifier; (111) Data memory circuit; (112) Synchronous clock signal generating circuit; (113) Bitmap memory; (114) Deflection speed calculating circuit