发明名称 Diamond enhanced thickness shear mode resonator
摘要 <p>The present invention provides a thickness shear mode (TSM) resonator comprising a diamond layer with at least 90% sp3 bonding or diamond bonding and a method for manufacturing such a resonator. The thickness shear mode resonator according to embodiments of the invention may advantageously be used in biosensor application and in electrochemistry applications. </p>
申请公布号 EP1926211(A3) 申请公布日期 2013.08.14
申请号 EP20070076003 申请日期 2007.11.20
申请人 IMEC;UNIVERSITEIT HASSELT 发明人 WILLIAMS, OLIVER
分类号 C23C16/27;H03H9/17 主分类号 C23C16/27
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