发明名称 METHOD FOR FACILITATING THE LOCATION OF DIFFRACTION SPOTS
摘要 <p>A method to facilitate positioning of diffraction spots in a diffraction pattern. This method comprises the following successive steps: a) obtaining a diffraction pattern by illuminating at least part of a sample comprising at least one periodic zone by an incident radiation beam that can be diffracted by said at least one periodic zone of the sample, and by placing a detector on the path of the beam thus diffracted; b) positioning of diffraction spots present on the diffraction pattern obtained in step a), by determining the spatial coordinates of these spots on the detector. Step b) is facilitated by the use of means in step a) to modify the shape and increase the contour length of diffraction spots forming on said pattern.</p>
申请公布号 EP2625510(A1) 申请公布日期 2013.08.14
申请号 EP20110764196 申请日期 2011.10.04
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 ROUVIERE, JEAN-LUC
分类号 G01N23/20;G01N23/00 主分类号 G01N23/20
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