发明名称 Copper Wire, Flat Panel Display Device Using the Same, and Method of Fabricating For the Copper Wire
摘要 <p>The present invention relates to a copper wire in a semiconductor device in which a barrier layer is formed for improving adhesion of a copper wire without any additional fabricating step; a method for fabricating the same, and a flat panel display device with the same. The copper wire includes a barrier layer formed on an underlying structure, and a copper conductive layer on the barrier layer, wherein the barrier layer includes at least one of a Cu2O layer and a CuOxNy layer.</p>
申请公布号 KR101296654(B1) 申请公布日期 2013.08.14
申请号 KR20070137386 申请日期 2007.12.26
申请人 发明人
分类号 H01L21/28;H01L29/786 主分类号 H01L21/28
代理机构 代理人
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