Nonlinear nanomechanical oscillators for ultrasensitive inertial detection

摘要

A system for ultrasensitive mass and/or force detection of this invention includes a mechanical oscillator driven to oscillate in a nonlinear regime. The mechanical oscillator includes a piezoelectric base with at least one cantilever resonator etched into the piezoelectric base. The cantilever resonator is preferably a nonlinear resonator which is driven to oscillate with a frequency and an amplitude. The system of this invention detects an amplitude collapse of the cantilever resonator at a bifurcation frequency as the cantilever resonator stimulated over a frequency range. As mass and/or force is introduced to the cantilever resonator, the bifurcation frequency shifts along a frequency axis in proportion to the added mass.