发明名称 Semiconductor substrate and method for manufacturing semiconductor device
摘要 Provided is a method for manufacturing a semiconductor device, which prevents waste generation from being caused peeling of films and prevents failure of peeling from being caused by waste due to peeling of films. A first semiconductor substrate is used which has a structure in which a peeling layer is not formed in a section subjected to a first dividing treatment, so that the peeling layer is not exposed at the end surface of a second semiconductor substrate when the second semiconductor substrate is cut out of the first semiconductor substrate. In addition, a supporting material is provided on a layer to be peeled of the second semiconductor substrate before the second semiconductor substrate is subjected to a second dividing treatment.
申请公布号 US8507322(B2) 申请公布日期 2013.08.13
申请号 US201113165063 申请日期 2011.06.21
申请人 CHIDA AKIHIRO;OIKAWA YOSHIAKI;KAWANABE CHIHO 发明人 CHIDA AKIHIRO;OIKAWA YOSHIAKI;KAWANABE CHIHO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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