| 摘要 |
PURPOSE: An etching tank which has a filtering function is provided to supply high-quality etchant by supplying an etchant after filtering a sludge which is included in the etchant in an etching chamber. CONSTITUTION: An etching tank (100) which has a filtering function comprises an etchant accommodating chamber (10), an etchant inlet part (20), an etchant outlet part (30), and a partition wall (40). The etchant accommodating chamber forms an internal space (11). The etchant inlet part is formed in one side of the etchant accommodating chamber, and guides an etchant which is flowed from the etching chamber to the etchant accommodating chamber. The etchant outlet part is formed in the other side of the etchant accommodating chamber, and guides the etchant which is in the inside of the etchant accommodating chamber to the inside of the etching chamber. The partition wall is arranged inside the etchant accommodating chamber, and divides the internal space of the etchant accommodating chamber into at least more than two fractional areas. |
