| 摘要 |
PURPOSE: A multi-layered metal pattern for transfer and a manufacturing method of a metal pattern suitable for the same are provided to facilitate stress control by controlling the thicknesses of a first and a second metal layer. CONSTITUTION: A first metal layer is formed by first electro-forming plating(s804). The first metal layer has a first internal stress. A second metal layer is formed on the upper part of the first metal layer by second electro-forming(s806). The second metal layer has a second internal stress which is different from the first internal stress. The stress of a metal pattern is controlled by controlling the thicknesses of the first metal layer and the second metal layer. [Reference numerals] (s802) Master preparation; (s804) First electro-forming plating(lower metal layer, t1_1); (s806) Second electro-forming plating(upper metal layer, t1_2) |
