| 摘要 |
PURPOSE: An apparatus and method for forming a film are provided to easily laminate a reaction product by repeating a cycle to successively supply various kinds of processing gases several times. CONSTITUTION: A rotary table (2) is installed in a vacuum container. The vacuum container includes a ceiling panel (11) and a container body. A separation gas supplying unit supplies a separation gas. A modifying gas supplying unit supplies a modifying gas to a modifying area. A first plasma generating unit (81) changes the modifying gas to plasma. [Reference numerals] (AA,BB,CC,DD) N2 gas |
