HEAT TREATMENT APPARATUS AND METHOD OF CONTROLLING THE SAME

摘要

PURPOSE: A heat processing apparatus and a controlling method thereof are provided to prevent the overshoot of a temperature by including a step of selecting a temperature control model. CONSTITUTION: A processing chamber receives an object. A heating unit heats the object. A memory unit memorizes two or more temperature control models. A temperature control unit (36) controls the temperature of the heating unit. A device control unit (100) controls the temperature control unit and the memory unit. [Reference numerals] (111,121) Model memory unit; (112) Recipe memory unit; (115,125) I/O port; (118) Operating panel; (28) Pressure control unit; (AA) Mass flow controller