NOVEL DESIGN OF TOOL FUNCTION TO IMPROVE FAB PROCESS IN SEMICONDUCTOR MANUFACTURING

摘要

PURPOSE: A novel design of a tool function for improving a FAB process for manufacturing a semiconductor is provided to improve processing performance by using tool sensor data and a tool model. CONSTITUTION: A sensor data component provides tool sensor data. A tool model generates model outputs based on model inputs. Tool process data (330) is provided to the sensor data component. The model outputs include one of confidence levels and predicted manufacturing properties. [Reference numerals] (302) Performance prediction model; (304) Sensor data; (308) Model accuracy output; (310) Yield prediction output; (312) Chamber matching output; (320) Certainty level; (322) Output data; (328) Measurement; (330) Tool process data