发明名称 |
FABRICATION OF MOS DEVICE WITH SCHOTTKY BARRIER CONTROLLING LAYER |
摘要 |
Fabricating a semiconductor device includes: forming a gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the gate trench; forming a body; forming a source; forming an active region contact trench that extends through the source and the body into the drain; forming a Schottky barrier controlling layer in the epitaxial layer in bottom region of the active region contact trench; and disposing a contact electrode within the active region contact trench.
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申请公布号 |
US2013203225(A1) |
申请公布日期 |
2013.08.08 |
申请号 |
US201213725789 |
申请日期 |
2012.12.21 |
申请人 |
ALPHA & OMEGA SEMICONDUCTOR LIMITED;ALPHA & OMEGA SEMICONDUCTOR LIMITED |
发明人 |
BHALLA ANUP;WANG XIAOBIN;PAN JI;WEI SUNG-PO |
分类号 |
H01L29/872;H01L29/78 |
主分类号 |
H01L29/872 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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