| 摘要 |
PROBLEM TO BE SOLVED: To provide a detergent for an electronic material which exhibits extremely high detergent properties for abrasive grains even when used at high temperatures, and a method for producing the electronic material.SOLUTION: A detergent for an electronic material includes: a non-ionic surfactant (A) the cloud point in 2-wt.% aqueous solution of which is 35-95°C; a high-molecular anionic surfactant (B) having an aromatic ring and a sulfonic group in the molecule and having a weight average molecular weight of 1,000-100,000; and water. The cloud point in 2-wt.% aqueous solution of the detergent for the electronic material is 50-95°C. |
