| 摘要 |
PROBLEM TO BE SOLVED: To provide porous nanoscale membranes for efficiently performing separation of molecules in biological fluids.SOLUTION: A porous nanoscale membrane is manufactured through the steps of: applying a nanoscale film to one side of a substrate, where the nanoscale film includes a semiconductor material; masking an opposite side of the substrate; etching the substrate, beginning from the masked opposite side of the substrate and continuing until a passage is formed through the substrate, thereby exposing the film on both sides thereof to form a membrane; and then simultaneously forming a plurality of randomly spaced pores in the membrane. The resulting porous nanoscale membranes, characterized by substantially smooth surfaces, high pore densities, and high aspect ratio dimensions, can be used in filtration devices and microfluidic devices for biological fluids. |
