| 摘要 |
PROBLEM TO BE SOLVED: To provide uncontaminated air of high quality, in processing of electronic materials and of elements such as semiconductors.SOLUTION: A filter includes at least two different adsorptive media. First, chemisorptive media 16, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor processing and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media 32 is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150°C. The physisorptive media can include untreated, activated carbon. |
