发明名称 MANUFACTURING METHOD OF TORSION BAR, VIBRATION ELEMENT, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS AND IMAGE PROJECTION DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To make a manufacturing time of a torsion bar shorter than before.SOLUTION: A substrate material 500 made of metal or metal alloy is machine worked to form a torsion bar 31. A processing surface 400 of the torsion bar 31 is subjected to surface treatment to be smoothened. The present invention in which the torsion bar 31 is formed by machine work can reduce a manufacturing time of the torsion bar 31 compared to the prior art in which the torsion bar 31 is formed only by etching. Further, since the processing surface 400 of the torsion bar 31 is subjected to surface treatment to be smoothened, roughening that occurs on the processing surface 400 after working processing of metal or metal alloy can be alleviated.
申请公布号 JP2013152447(A) 申请公布日期 2013.08.08
申请号 JP20120278585 申请日期 2012.12.20
申请人 CANON ELECTRONICS INC 发明人 WAKABAYASHI TAKAYUKI;SUZUKI SHIGEMI;ARAI KATSUMI
分类号 G02B26/10;B81B3/00;B81C99/00;F16F1/14 主分类号 G02B26/10
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