METHOD FOR PRODUCING PHOTOELECTRIC CONVERTER AND PHOTOELECTRIC CONVERTER

摘要

The method for producing a photoelectric converter of the present invention comprises a preparation step for preparing a substrate (2) that has a photoelectric conversion layer (2a) and is formed from silicon; a first film-formation step for the formation of a first protective film (3) by deposition of aluminum oxide on a top surface (2B) of the substrate (2) using the atom deposition method or chemical vapor deposition method in an atmosphere containing hydrogen; and a second film-formation step for forming a second protective film (4) by deposition of aluminum oxide on the first protective film (3) using sputtering after the first film-formation step. Moreover, the photoelectric converter of the present invention comprises a substrate that has a photoelectric conversion layer and is formed from silicon; a first protective film that is deposited on the substrate and is formed from aluminum oxide; and a second protective film that is deposited on the first protective film and is formed from aluminum oxide, wherein the concentration of hydrogen contained in the first protective film is higher than the concentration of hydrogen contained in the second protective film.