| 摘要 |
<p>The purpose of the present invention is to obtain a fluoride spray coating covering member that has excellent halogen corrosion resistance and plasma erosion resistance, and that has identification symbols or the like such as text, numerals, shapes, patterns, company names, or production number displayed thereon. In the present invention, ions of one or more injection gases selected from a fluorine-containing gas, oxygen gas, and an inert gas are injected onto a white fluoride spray coating formed on the surface of a substrate, whereby at least a part of the white fluoride spray coating is blackened and a black ion injection layer is formed.</p> |
