发明名称 |
FILM-FORMING APPARATUS, AND METHOD FOR MAINTAINING FILM-FORMING APPARATUS |
摘要 |
Ignition sections are provided at two locations on each of lower portions of the side surfaces on both sides of a film-forming chamber so as to be provided at four locations in total. A flowing current is applied to the ignition sections when a flammable by-product is ignited. A first detecting section for measuring a pressure in the film-forming chamber is formed on the side surface of the film-forming chamber. A second detecting section is formed at the lower portion of the side surface of the film-forming chamber. A third detecting section for measuring a spatial temperature in the film-forming chamber is formed at an upper portion of the film-forming chamber.
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申请公布号 |
US2013199572(A1) |
申请公布日期 |
2013.08.08 |
申请号 |
US201113805929 |
申请日期 |
2011.06.22 |
申请人 |
HAYASHI TAKURO;SOGABE KOUJI;MATSUMOTO KOICHI;HASHIMOTO MASANORI;NAKAMURA KYUZO;HAGIWARA MUNEMOTO;UCHIDA HIROTO;MORI KATSUHIKO;SHIMIZU YASUO;SAKAMOTO MORIAKI;ULVAC, INC. |
发明人 |
HAYASHI TAKURO;SOGABE KOUJI;MATSUMOTO KOICHI;HASHIMOTO MASANORI;NAKAMURA KYUZO;HAGIWARA MUNEMOTO;UCHIDA HIROTO;MORI KATSUHIKO;SHIMIZU YASUO;SAKAMOTO MORIAKI |
分类号 |
B08B7/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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