发明名称 SHEET-DETACHING DEVICE AND DETACHING METHOD
摘要 <p>This sheet-detaching device (1) is equipped with: a supporting means (2) that has a tilted surface (21) which is tilted with respect to a horizontal plane and is for supporting a plate-like member (WF), which has an adhesive sheet (AS) applied to one surface, from the other surface side by means of the tilted surface (21); a feeding means (3) for feeding a detaching tape (PT); an application means (5) for applying the detaching tape (PT), which is fed by the feeding means (3), to the adhesive sheet (AS); and a moving means (6) for moving the supporting means (2) and the application means (5) relative to each other in the in-plane direction of the tilted surface (21) in order to detach the adhesive sheet (AS) from the plate-like member (WF).</p>
申请公布号 WO2013114952(A1) 申请公布日期 2013.08.08
申请号 WO2013JP50733 申请日期 2013.01.17
申请人 LINTEC CORPORATION 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址