发明名称 |
LIQUID CARBON DIOXIDE SUPPLY DEVICE AND SUPPLY METHOD |
摘要 |
Provided are a liquid carbon dioxide supply device and supply method that are energy-saving and efficient. The liquid carbon dioxide supply device is provided with: a circulation system equipped with a purifying unit that removes impurities and contaminants from the carbon dioxide, a storage unit provided with a condenser for changing the gaseous carbon dioxide that has passed through the purifying unit into liquid carbon dioxide, a supply unit provided with a first pump for supplying the liquid carbon dioxide in the storage unit to a use point, and a return line that returns excess carbon dioxide, which is supplied from the supply unit but is not used at the use point, towards the storage unit; and a carbon dioxide-introducing unit for introducing carbon dioxide starting material or recovered gas to the circulation system. The carbon dioxide-introducing unit is provided with a second pump for increasing the pressure of the carbon dioxide and introducing said carbon dioxide into the circulation system. |
申请公布号 |
WO2013115156(A1) |
申请公布日期 |
2013.08.08 |
申请号 |
WO2013JP51836 |
申请日期 |
2013.01.29 |
申请人 |
ORGANO CORPORATION;SUGAWARA, HIROSHI;ONO, YOSHINORI |
发明人 |
SUGAWARA, HIROSHI;ONO, YOSHINORI |
分类号 |
B01J3/02;B01D1/00;B08B7/00;C01B31/20;H01L21/304 |
主分类号 |
B01J3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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