发明名称 ULTRASONIC CLEANING APPARATUS AND POWER CONTROL METHOD EMPLOYED THEREIN
摘要 <p>[Problem] To provide an ultrasonic cleaning apparatus which is capable of further improving reliability of power management. [Solution] This ultrasonic cleaning apparatus is provided with a subject to be cleaned (11), a cleaning solution (12), an ultrasonic vibrator (13), an oscillator (14), a power supply unit (16), and a power meter (15). The oscillator (14) has: an oscillating unit (17); a control unit (18), which controls first power oscillated by means of the oscillating unit (17) such that the first power is at a set power value, and which outputs the power to the ultrasonic oscillator (13); a detecting unit (19), which detects the second power outputted to the ultrasonic oscillator (13) by means of the control unit (18); and a calculating unit (20). The calculating unit (20) has a functions of: deriving a first corrected power value obtained by correcting the first detected power value with a collection value (alpha); deriving a second corrected value obtained by correcting a measured power value with a correction value (beta), said measured power value having been measured by means of the power meter (15); and in cases where the first corrected power value deviated from the second corrected power value by a fixed value or more, recording a corrected correction value (alpha') in a recording unit (21), said corrected correction value having been obtained by correcting the correction value (alpha) such that the first corrected power value is equal to the second corrected power value.</p>
申请公布号 WO2013114738(A1) 申请公布日期 2013.08.08
申请号 WO2012JP82337 申请日期 2012.12.13
申请人 KAIJO CORPORATION;SUGIYAMA SUSUMU;ICHIKAWA KOJI 发明人 SUGIYAMA SUSUMU
分类号 B08B3/12;H01L21/304 主分类号 B08B3/12
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