发明名称 SHEET APPLICATION DEVICE AND APPLICATION METHOD
摘要 <p>This sheet application device (1) is equipped with: a supporting means (2) that has a tilted surface (21) which is tilted with respect to a horizontal plane and is for supporting a plate-like member (WF) by means of the tilted surface (21); a feeding means (3) for feeding a rolled sheet (RS), which is obtained by temporarily adhering an adhesive sheet (AS) to one surface of a belt-like backing sheet (RL), as an object to be fed; a detaching means (4) for detaching the adhesive sheet (AS) from the backing sheet (RL) of the rolled sheet (RS) which is fed by the feeding means (3); a pressing means (5) for pressing the adhesive sheet (AS), which is detached by the detaching means (4), against the plate-like member (WF); and a moving means (7) for moving the supporting means (2) and the pressing means (5) relative to each other in the in-plane direction of the tilted surface (21) in order to apply the adhesive sheet (AS) to the plate-like member (WF).</p>
申请公布号 WO2013114951(A1) 申请公布日期 2013.08.08
申请号 WO2013JP50732 申请日期 2013.01.17
申请人 LINTEC CORPORATION 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
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