发明名称 Method and apparatus for vapor and gas filtration
摘要 A gas filtration apparatus and method comprises a housing with an inlet for gas to enter and an outlet for the gas to exit. The housing contains a filter comprised of sintered metal fibers having an active filtration area through which the gas flows to remove suspended particles from the gas. The filter is substantially uniform in thickness and porosity through the active filtration area. The filter media being sealed to a metal structure in the housing with the metal structure having an opening to permit gas to flow through. A method of making a vapor/gas mixture includes the steps of producing a vapor in a gas to form the vapor/gas mixture passing the vapor/gas mixture through an opening in a housing containing a filter comprised of sintered metal fibers through which the vapor/gas mixture flows.
申请公布号 US2013203264(A1) 申请公布日期 2013.08.08
申请号 US201213570364 申请日期 2012.08.09
申请人 LIU BENJAMIN Y.H.;MA YAMIN;DINH THUC M.;MSP CORPORATION 发明人 LIU BENJAMIN Y.H.;MA YAMIN;DINH THUC M.
分类号 B01D39/20;B01D46/00;C23C16/455;C23C16/50;H01L21/302 主分类号 B01D39/20
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