发明名称 DICING SYSTEM AND METHOD
摘要 A singulation system for dicing IC units from a substrate comprising; a block (30) for receiving said substrate (31), said block movable from a substrate receiving station to a dicing station; a first dicing saw (10) for dicing the substrate when at the dicing station; a second dicing saw (15) for dicing the substrate when at the dicing station; wherein the first and second dicing saws are of different varieties so as to perform different dicing functions on said substrate.
申请公布号 WO2010056209(A3) 申请公布日期 2013.08.08
申请号 WO2009SG00426 申请日期 2009.11.16
申请人 ROKKO SYSTEMS PTE LTD;JUNG, JONG, JAE;BAEK, SEUNG, HO;LIM, CHONG CHEN, GARY 发明人 JUNG, JONG, JAE;BAEK, SEUNG, HO;LIM, CHONG CHEN, GARY
分类号 B28D5/02;H01L21/304;H01L21/67 主分类号 B28D5/02
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