| 摘要 |
PROBLEM TO BE SOLVED: To improve the convenience of a substrate-related-operation performing apparatus.SOLUTION: A substrate-related-operation performing apparatus includes: a slide 128; a slide moving device for moving the slide along a guide; and a work head 21 detachably installed to the slide. Optionally selected one of a plurality of mounting heads can be installed. On a work head installed portion 332 provided on the slide, lateral direction position regulating means 334, 340, 336, and 344 engaged with an installing portion 330 of the mounting head to regulate an installing position in a lateral direction of the work head, and vertical position regulating means 334 and 338 for regulating an installing position of the work head are provided. |
