| 摘要 |
PROBLEM TO BE SOLVED: To keep a substrate detection performance for a long time.SOLUTION: A substrate positioning device comprises: a holding section; a light emitting section and a light receiving section; a light emission control section; a detection section; and an adjustment section. The holding section holds a substrate. The light emitting section and the light receiving section are opposed to each other on each main surface side of the substrate. The light emission control section controls a light emission amount of the light emission section by a control value. The detection section detects an amount of light received by the light receiving section. The adjustment section adjusts the control value based on the light receiving amount while the substrate is not held by the holding section. |
