| 摘要 |
An embodiment includes a loading unit with an alignment mark configured to support a substrate, a laser beam generating unit configured to generate a laser beam toward the upper surface of the loading unit, a vision unit that causes the laser beam generating unit to irradiate the laser beam onto the substrate on the loading unit to form an alignment mark on the substrate and that generates corrected coordinate values based on the formed alignment mark on the substrate, a position detector located at the center of the loading unit to detect information about the laser beam generated by the laser beam generating unit, and a controller that controls an X-Y scanning mirror according to the corrected coordinate values, and controls power of the laser beam generated by the laser beam generating unit or the position of the loading unit according to the information detected by the position detector. |
