| 摘要 |
A method and an inspection apparatus is disclosed for detecting contaminant particles such as one or more first, second and third contaminant particles having a first, a second and a third characteristic respectively on an article under inspection. The inspection apparatus includes an optical system having a single or a combination of filters associated with the first, second and third characteristics of the one or more first, second and third contaminant particles to discriminate chemical or mechanical types of the particles. For example, a hard particle and two different types of soft particles can be distinguished by using a color filter or differential filters. |
