PIEZOELECTRIC FILM STRUCTURE BODY OF BOTH ENDS FIXED TYPE

摘要

PURPOSE: A piezoelectric thin film structure of a both-end fixing type is provided to increase the generation efficiency of a piezoelectric element by forming a both-end supporting beam on the end of a fixing terminal of the piezoelectric element. CONSTITUTION: A piezoelectric element (110) is composed of a cantilever. One end of the cantilever is fixed. The other end of the cantilever is not supported. A both-end supporting beam (120) is formed on the upper side of a piezoelectric thin film structure which is separated from one side of the piezoelectric element.