发明名称 Methods and Apparatuses of Using Metal Needle Arrays for Specimen Lift-Out and Circuit Edit
摘要 Embodiments of the present invention provide method and apparatus of restoring probes attached to the manipulator in a control environment (e.g. vacuum chamber of an focus ion beam) without a need to open the vacuum chamber. Another embodiment of the present invention teaches construction and application of various shapes of nanoforks from a nanoneedles array inside a FIB vacuum chamber. In another embodiment, the present invention teaches edition and correction of completed and oxide-coated circuit boards by re-nano-wiring using nanoneedles of a nanoneedles array (as nanowire supply), contained in the same controlled space. In this embodiment, individual nanoneedles in a nanoneedle array are manipulated by a manipulator and placed in such a way to make electrical contact between the desired points.
申请公布号 US2013199034(A1) 申请公布日期 2013.08.08
申请号 US201213366316 申请日期 2012.02.04
申请人 YAZDANPANAH MEHDI M.;JALILIAN ROMANEH 发明人 YAZDANPANAH MEHDI M.;JALILIAN ROMANEH
分类号 B23D81/00;H05K3/10 主分类号 B23D81/00
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