发明名称 SPECTROSCOPE AND MICROSPECTROSCOPY SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a spectroscope which avoids malfunction due to polarization dependence of a spectroscopic element while suppressing increase in size and cost, and to provide a microspectroscopy system including the spectroscope.SOLUTION: A spectroscope 40 used in a microspectroscopy system 1 includes: a collimating lens 41 which collimates signal light into a substantially collimated light beam; a polarization separation element 42 which separates the substantially collimated light beam into light beams on two optical paths, i.e., a light beam having a P polarized component on a first optical path C1 and a light beam having an S polarized component on a second optical path C2; a polarization rotation element 43 which is placed on the first optical path C1 and rotates the light beam having the P polarized component to a light beam having the S polarized component; an optical path coupling member 44 which reduces a diameter of each of the substantially collimated light beams on the first optical path C1 and the second optical path C2 while maintaining the light beams to be collimated; a diffraction grating 45 serving as a spectroscopic element for dispersing the substantially collimated light beams emitted from the optical path coupling member 44; a light receiver 47 which detects spectral light beams dispersed by the diffraction grating 45; and a light convergence optical system 46 which converges the spectral light beams coming from the diffraction grating 45 on the light receiver 47.
申请公布号 JP2013152179(A) 申请公布日期 2013.08.08
申请号 JP20120013720 申请日期 2012.01.26
申请人 NIKON CORP 发明人 SATAKA RYOICHI
分类号 G01J3/18;G01J3/443;G01N21/27;G01N21/64;G02B21/06 主分类号 G01J3/18
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