发明名称 SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF
摘要 A semiconductor structure includes a substrate, a resist layer, a dielectric material, two U-shaped metal layers and two metals. The substrate has an isolation structure. The resist layer is located on the isolation structure. The dielectric material is located on the resist layer. Two U-shaped metal layers are located at the two sides of the dielectric material and on the resist layer. Two metals are respectively located on the two U-shaped metal layers. This way a semiconductor process for forming said semiconductor structure is provided.
申请公布号 US2013200393(A1) 申请公布日期 2013.08.08
申请号 US201213369260 申请日期 2012.02.08
申请人 CHEN CHIEH-TE;LIN YI-PO;LIAO JIUNN-HSIUNG;LU SHUI-YEN;CHEN LI-CHIANG 发明人 CHEN CHIEH-TE;LIN YI-PO;LIAO JIUNN-HSIUNG;LU SHUI-YEN;CHEN LI-CHIANG
分类号 H01L29/16;H01L21/28 主分类号 H01L29/16
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