| 摘要 |
<p>PURPOSE: A cryo-pump is provided to facilitate repairs when malfunctions occur. CONSTITUTION: A cryo-pump (100) comprises a housing (102), a fitting control part (112), a purge valve (104), a rough valve (106), a vent valve (108), and a manometer (110). The purge valve is installed on a passage between an external purge gas source and the housing. The fitting control part is connected to at least one of the purge valve, the rough valve, the vent valve, and the manometer by wires (114,116,117,118). A member connector and the fitting control part connector are installed in the wires. The member connector is detachably coupled to the fitting control part connector.</p> |
