Ag ALLOY FILM FOR REFLECTING ELECTRODE, REFLECTING ELECTRODE AND Ag ALLOY SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To attain an Ag alloy film which is used for a reflecting electrode, demonstrating low electric resistivity and high reflectance substantially the same level as those of a pure Ag film, and excellent in oxidation resistance.SOLUTION: An Ag alloy film for a reflecting electrode is used for the reflecting electrode provided on a substrate, and contains at least one kind to be selected among a group consisting of In and Zn in an amount of 0.1-2.0 atm%.