| 摘要 |
An array substrate for an LCD(Liquid Crystal Display) and a manufacturing method thereof are provided to reduce costs by manufacturing the substrate through 4 mask processes in comparison with a 5 mask processes, simplify manufacturing processes, prevent an active layer form being exposed to the outside of ends of source and drain electrodes, and preventing a semiconductor pattern from being formed in a lower part of a data line, thereby preventing wavy noise caused by photo currents. By performing a first mask process on a substrate(201) where a pixel area is defined, a gate line(210) and a gate electrode(208) of a double layer structure prolonged in one direction are formed. After that, a pixel electrode(215) of a single layer is formed within the pixel area. On the front of the gate line, gate electrode and pixel electrode, a gate insulating layer(220) is formed. By performing a second mask process on the gate insulating layer, a data line for defining the pixel area by crossing the gate line, and source and drain electrodes(225,227) spaced from each other on an upper part of the gate electrode are formed. At the same time, an ohmic contact layer(230) is formed on an upper part of the source and drain electrodes. By performing a third mask process in an upper part of the ohmic contact layer and in the spaced area of the source and drain electrodes, an active layer(250) is formed. By performing a fourth mask process on the front of the active layer, a passivation layer(255) is formed. The passivation layer has a contact hole(257) for simultaneously exposing the pixel electrode and the ohmic contact layer on the drain electrode. A metal layer is formed by applying liquid type metal material to the upside of the passivation layer having the contact hole. By performing dry etching of the metal layer, metal patterns(263) for connecting the drain electrode and the pixel electrode are formed within the contact hole. |
