| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing fluid composition for a hard disk substrate, reducing the piercing of alumina particles and roll-off (end face droop) on the substrate. SOLUTION: The polishing fluid composition for a hard disk substrate includes the alumina particles, silica particles, and water, and the silica particles whose shape factor SF-1 showing the degree of roundness of particles is 130-180, are included at least 20 wt.% to the whole silica particles. COPYRIGHT: (C)2009,JPO&INPIT |
