| 摘要 |
PROBLEM TO BE SOLVED: To insert and eject an arbitrary substrate to/from a cassette utilizing wires and a narrow gap between the wires. SOLUTION: A substrate transfer device is provided for inserting and ejecting the substrate to/from a wire cassette having a plurality of wires for supporting substrates in a multiplicity of stages in the vertical direction. The substrate transfer device includes: a long arm arbitrarily advancing and retracting to/from the gap between upper and lower wires of the wire cassette; supporting members disposed in at least two columns on the upper side of the arm in the longitudinal direction of the arm; a lifting drive unit for lifting the supporting members in the at least two columns column-by-column between an ascending position to support the substrate and a descending position to avoid the wire; and a control unit for controlling the lifting drive unit. COPYRIGHT: (C)2012,JPO&INPIT |
