| 摘要 |
<p>Provided is an X-ray inspector (1) capable of non-destructively measuring a shape and content of gold (Au) contained in an object to be inspected (W), promptly with high accuracy. An X-ray inspector includes: an X-ray generator (4) that irradiates an object to be inspected (W) with X-rays having energy of 90 keV or higher (L); X-ray detector (6,7) that detects the X-rays transmitted through the object to be inspected (W); a computing section (8) that measures a shape and content of Au contained in the object to be inspected (W) based on an X-ray signal detected by the X-ray detector (6,7), wherein an Au filter (13) and a Pt filter (14) are respectively provided between the X-ray detector and the object to be inspected. The X-ray detector (6,7) detects X-rays emitted from the X-ray generator and transmitted through the object to be inspected and the Au filter (13) and X-rays emitted from the X-ray generator and transmitted through the object to be inspected and the Pt filter (14). The computing section measures the shape and the content of Au contained in the object to be inspected (W) based on X-ray signals corresponding respectively to the X-rays.</p> |
